Rotational motion based, electrostatic power source and methods thereof

ABSTRACT

A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the other electrode and is at least partially in alignment with the other electode. At least one of the member and the at least one pair of electrodes is moveable with respect to the other. When at least one of the sections is at least partially between the pair of electrodes, the at least one of the sections has the stored static electric charge closer to one of the pair of electrodes. When at least one of the other sections is at least partially between the pair of electrodes, the other section has the stored static electric charge closer to the other one of the pair of electrodes.

This application is a continuation-in-part application of U.S. patentapplication Ser. No. 10/280,304 filed Oct. 24, 2002 now U.S. Pat. No.6,750,590 which claims the benefit of U.S. Provisional PatentApplication Ser. No. 60/338,163, filed Oct. 26, 2001, which are bothhereby incorporated by reference in their entirety.

This invention was made with Government support under Grant No.DEFG02-02ER63410.A100, awarded by the Department of Energy on Oct. 1,2002. The Government has certain rights in the inventions.

FIELD OF THE INVENTION

This invention relates generally to power sources and, moreparticularly, to an electrostatic based power source and a methodsthereof.

BACKGROUND OF THE INVENTION

There are a growing number of devices which require portable powersources. A variety of different types of portable power sources areavailable.

One of these types of portable power sources is batteries. For mostapplications batteries provide an adequate source of power.Unfortunately, batteries have finite lifetime and thus require periodicreplacement.

Another type of portable power source are solar powered systems. Solarpower systems also provide an adequate amount of power and provide arecharging mechanism. Unfortunately, the recharging mechanism requiressolar radiation, which may not always be available and requires properorientation to the solar radiation, which may not always be convenient.

SUMMARY OF THE INVENTION

A power system in accordance with one embodiment of the presentinvention includes a housing with a chamber, a member with a storedstatic electrical charge, and a pair of electrodes. The member isconnected to the housing and extends at least partially across thechamber. The pair of electrodes are connected to the housing, are spacedfrom and on substantially opposing sides of the member from each other,and are at least partially in alignment with each other. The member ismovable with respect to the pair of electrodes or one of the pair ofelectrodes is movable with respect to the member.

A method of making a power system in accordance with another embodimentof the present invention includes providing a housing with a chamber,providing a member with a stored static electrical charge, and providinga pair of electrodes connected to the housing. The member is connectedto the housing and extends at least partially across the chamber. Thepair of electrodes are spaced from and on substantially opposing sidesof the member and are at least partially in alignment with each other.The member is movable with respect to the pair of electrodes or one ofthe pair of electrodes is movable with respect to the member.

A method for generating power in accordance with another embodiment ofthe present invention includes moving a member with a stored staticelectrical charge with respect to at least one of a pair of electrodesor one of the pair of electrodes with respect to the member, inducing apotential on the pair of electrodes as a result of the moving, andoutputting the induced potential.

A power system in accordance with embodiments of the present inventionincludes a member with two or more sections and at least one pair ofelectrodes. Each of the two or more sections has a stored static charge.Each of the pair of electrodes is spaced from and on substantiallyopposing sides of the member from the other electrode and is at leastpartially in alignment with the other electode. At least one of themember and the at least one pair of electrodes is moveable with respectto the other. When at least one of the sections is at least partiallybetween the pair of electrodes, the at least one of the sections has thestored static electric charge closer to one of the pair of electrodes.When at least one of the other sections is at least partially betweenthe pair of electrodes, the other section has the stored static electriccharge closer to the other one of the pair of electrodes.

A method of making a power system in accordance with embodiments of thepresent invention includes providing a member with two or more sectionsand providing at least one pair of electrodes. Each of the two or moresections has a stored static charge. Each of the pair of electrodes isspaced from and on substantially opposing sides of the member from theother electrode and is at least partially in alignment with the otherelectode. At least one of the member and the at least one pair ofelectrodes is moveable with respect to the other. When at least one ofthe sections is at least partially between the pair of electrodes, theat least one of the sections has the stored static electric chargecloser to one of the pair of electrodes. When at least one of the othersections is at least partially between the pair of electrodes, the othersection has the stored static electric charge closer to the other one ofthe pair of electrodes.

A method for generating power in accordance with embodiments of thepresent invention includes moving at least one of a member and at leastone pair of electrodes with respect to the other, inducing a potentialon the pair electrodes as a result of the moving, and outputting theinduced potential. The member comprises two or more sections where eachof the sections has a stored static electrical charge. When at least oneof the sections is at least partially between the pair of electrodes,the at least one of the sections has the stored static electric chargecloser to one of the pair of electrodes. When at least one of the othersections is at least partially between the pair of electrodes, the othersection has the stored static electric charge closer to the other one ofthe pair of electrodes.

The present invention provides a power system which is compact, easy touse, and easy to incorporate in designs. This power system is renewablewithout requiring replacement of the system and without the need forsolar radiation or proper orientation to solar radiation. Instead, thepresent invention is able to effectively extract energy, and hencepower, from the sensor local environment. By way of example only, theenvironment may include local earth ambient, vibrational energy frommachines or motion from animals or humans, fluid motion such as wind orwaves, manual rotation.

BRIEF DESCRIPTION OF DRAWINGS

FIGS. 1–10 are side, cross-sectional view of a method for making anelectrostatic power source in accordance with one embodiment of thepresent invention;

FIG. 11 is a side, cross-sectional view of the electrostatic powersource shown in FIG. 10 coupled to a load;

FIG. 12 is a side, cross-sectional view of an electrostatic power sourcewith an electrode in accordance with another embodiment of the presentinvention;

FIG. 13 is a side, cross-sectional view of an electrostatic power sourcewith a movable member and base in accordance with another embodiment ofthe present invention;

FIG. 14 is a side, cross-sectional view of an electrostatic power sourcewith a movable member and base in accordance with another embodiment ofthe present invention;

FIG. 15 is a side, cross-sectional view of an electrostatic power sourcewith a movable member and base in accordance with another embodiment ofthe present invention;

FIG. 16 is a cross-sectional diagram of a power system in accordancewith another embodiment of the present invention;

FIG. 17 is a side view of the embedded charge member for the powersystem shown in FIG. 16;

FIG. 18A is side view of a portion of the embedded charge member shownin FIG. 17 in a first position between a pair of electrodes;

FIG. 18B is side view of a portion of the embedded charge member shownin FIG. 17 in a second position between a pair of electrodes; and

FIGS. 19A–19D are side, cross-sectional view of a method for making apower system in accordance with another embodiment of the presentinvention.

DETAILED DESCRIPTION

A power system 20(1) in accordance with one embodiment of the presentinvention is illustrated in FIGS. 10 and 11. The power system 20(1)includes a housing 22 with a chamber 24, a member 26(1) with a storedstatic electrical charge, and a pair of electrodes 28(1) and 30. Thepresent invention provides a power system 20(1) which is compact, easyto use, and easy to incorporate in designs.

Referring to FIGS. 10 and 11, the housing 22 has an internal chamber 24and is made of a variety of layers, although other types of supportingstructures in other configurations and other numbers of layers, such asone or more, made of other materials can be used. The size of thehousing 22 and of the chamber 24 can vary as required by the particularapplication.

The member 26(1) extends across the chamber 24 and is connected onopposing sides to an inner wall of the housing 22, although otherarrangements can be used, such as having the member 26(1) secured atalong one end or edge with the another end or edge space from the innerwall of the chamber 24 or connected on all sides or edges to the innerwall of the chamber 24 like a diaphragm. Each of the first and secondelectrodes 28(1) and 30 is initially spaced substantially the samedistance from the member 26(1), although other configurations can beused. The chamber 24 is sealed with a fluid, such as air, although othertypes of fluids and/or materials can be used or the chamber or thechamber can be sealed in a vacuum. The position of the member 26(1) canbe altered as a result of a movement of power system 20(1), althoughother configurations can be used, such as having the member 26(1) beingfixed and one of the pair of electrodes 28(2) whose position can bealtered as a result of a movement of power system 20(2) as shown in FIG.12.

The member 26(1) can store a fixed static electrical charge, althoughmember 26(1) can store other types of charge, such as a floatingelectrical charge. The member 26(1) has a pair of dissimilar layers 32and 36 of dielectric material, such as silicon oxide, silicon dioxide,silicon nitride, aluminum oxide, tantalum oxide, tantalum pentoxide,titanium oxide, titanium dioxide, barium strontium titanium oxide,calcium fluoride, and magnesium fluoride, although other types of andcombinations of materials which can hold a charge and other numbers oflayers, such as a member 26(2) with one layer 37 as shown in FIG. 12 orthree or more layers can be used. The layers 32 and 36 are seatedagainst each other along an interface 34 were the static electricalcharge is stored. The member 26(1) can hold a fixed charge along theinterface on the order of at least 1×10¹⁰ charges/cm² and forms astructure with a monopole charge, such as electrons, at the interface.In this particular embodiment, a negative charge from the electrons isstored at the interface, although other arrangements could be used.

The pair of electrodes 28(1) and 30 are located in the inner walls ofthe housing 22 in chamber 24, although other configurations forconnecting the pair of electrodes 28(1) and 30 to the housing 22 can beused, such as having each of the first and second electrodes 28(1) and30 located in the inner wall of the housing 22 and spaced from thechamber 24 by one or more layers of material, such as an insulatingmaterial, or by having each of the first and second electrodes 28(1) and30 seated on the inner walls of the housing 22 in the chamber 24. Thefirst and second electrodes 28(1) and 30 are in substantial alignmentwith each other and are spaced from and located on a substantiallyopposing sides of the member 26(1), although other configurations can beused. By way of example only, the distance between each of the pair ofelectrodes 28(1) and 30 is about 1.0 microns, although this distance canvary. Depending on the material and/or fluid in the chamber 24, such asair or a vacuum, the electrodes 28(1) and 30 will be spaced differentdistances from the member 26(1). In this particular embodiment, thisspacing is determined so that the electrodes 28(1) and 30 with respectto the member 26(1) have equal amounts of induced electrical charge atan initial state, although other arrangements can be used.

A load 38, such as a cell phone or a pager, is coupled to the pair ofelectrodes 28(1) and 30, although other types of devices can be coupledto the electrodes 28(1) and 30, such as a device which uses and/orstores the generated power.

Referring to FIG. 12, a power system 20(2) in accordance with anotherembodiment is shown. Elements in FIG. 12 which are like elements shownand described in FIGS. 1–11 will have like numbers and will not be shownand described in detail again here. The member 26(2) comprises a singlelayer 37 of dielectric material, such as silicon oxide, silicon dioxide,silicon nitride, aluminum oxide, tantalum oxide, tantalum pentoxide,titanium oxide, titanium dioxide, barium strontium titanium oxide,calcium fluoride, and magnesium fluoride, in which the static electricalcharge is held, although the member 26(2) can have other numbers oflayers. The member 26(2) extends across the chamber 24 and is connectedon opposing sides to an inner wall of the housing 22, although otherarrangements can be used, such as having the member 26(2) secured atalong one end or edge with the another end or edge space from the innerwall of the chamber 24. The position of one of the pair of electrodes 30with respect to the member 26(2) is fixed and the position of the otherone of the electrodes 28(2) with respect to the member 20(2) can bealtered as a result of a movement of power system 20(2), although otherconfigurations can be used. The space in chamber 24 between member 26(2)and electrode 30 is filled with a layer of dielectric material, althoughthe space could be filled with other fluids and/or materials, such asair or a vacuum could be used.

A resilient device 40, such as a spring or a resilient material, isprovided between the member 26(2) and the electrode 28(2), although thespace between the member 26(2) and electrodes 28(2) and 30 can be filledwith other types of resilient devices or materials. The resilient device40 is used to move the electrode 28(2) back to an initial position whenthe electrode 28(2) has been moved as a result of some other movement.

A load 38, such as a cell phone or a pager, is coupled to the pair ofelectrodes 28(1) and 30, although other types of devices can be coupledto the electrodes 28(1) and 30, such as a device which uses and/orstores the generated power.

By way of example only, the power system 20(2) could be incorporated ina variety of devices, such as in a heel of a boot. The electrode 28(1)may be located in the sole of the boot and would be pushed towards themember 26(1) every time a step was taken. When the sole of the boot waslifted off the ground, then the resilient devices 40(1)–40(4) would pushthe electrode 28(1) back away from the electrode 26(1). As a result, thepower system 20(2) could generate power as someone was walking for avariety of different types of devices.

Referring to FIG. 13, a power system 20(3) in accordance with anotherembodiment is shown. Elements in FIG. 13 which are like elements shownand described in FIGS. 1–11 will have like numbers and will not be shownand described in detail again here. In this particular embodiment, theelectrodes 28(1) and 30 are connected to the housing 22, member 26(1) isconnected to a substrate 42 with supports 39(1) and 39(2), resilientdevices 40(5)–40(7), such as springs, are coupled between electrode28(1) and substrate 30, and resilient devices 40(8) and 40(9), such assprings, are connected between electrode 30 and member 26(1), althoughother configurations, materials, and devices can be used.

Referring to FIG. 14, a power system 20(4) in accordance with anotherembodiment is shown. Elements in FIG. 14 which are like elements shownand described in FIGS. 1–11 will have like numbers and will not be shownand described in detail again here. In this particular embodiment, aninsulating material 51 is between and connects electrode 30 and member26(1) and resilient devices 40(10) and 40(11) are coupled betweenelectrode 30 and substrate 42, although other configurations, materials,and devices can be used.

Referring to FIG. 15, a power system 20(5) in accordance with anotherembodiment is shown. Elements in FIG. 15 which are like elements shownand described in FIGS. 1–11 will have like numbers and will not be shownand described in detail again here. In this particular embodiment, aninsulating material 51 is between electrode 30 and member 26(1) and atone end the member 30 is pivotally connected at a pivotal connection 55to the housing 22, although other configurations, materials, and devicescan be used.

Referring to FIGS. 16–18B, a power system 20(6) in accordance withanother embodiment is illustrated. A propeller 60 is seated on oneportion of a rotatable shaft 62 and a member 26(3) seated on anotherportion of the shaft 62, although other types of components, such asanother device which could rotate or move the member 26(3) with orwithout a shaft 62 in response to the motion of a fluid or by manualrotation or a rotation or movement of the electrodes 64(1) and 64(2)with respect to the member 26(3), in other arrangements could be used.When a fluid, such as air or water, strikes the propeller 60, thepropeller begins to rotate which causes the shaft 62. The rotation ofthe shaft 62 rotates the member 26(3) through the electrodes64(1)–64(2).

The member 26(3) has a substantially circular shape and has asubstantially uniform thickness, although the member 26(3) could haveother shapes and thicknesses. The member 26(3) is also divided into foursection 69(1)–69(4) which are each substantially the same size, althoughthe member 26(3) could have other configurations, such as greater orlesser numbers of sections. Each of the sections 69(1)–69(4) has a firstinsulating layer 66, such as SiO₂ by way of example only, seated onsecond insulating layers 70(1) and 70(2), such as Si₃N₄ by way ofexample only, with an interface 68(1) between the layers 66 and 70(1)and an interface 68(2) between layers 66 and 70(2). The thickness of thefirst insulating layer 66 is greater than the thickness of each of thesecond insulating layers 70(1) and 70(2) so the interface 68 is closerto the outer surface of each of the second insulating layers 70(1) and70(2) than to the outer surface of the first insulating layer 66,although other configurations could be used. The sections 69(1) and69(3) are substantially the same and have the first insulating layer 66facing the electrode 64(2) and the second insulating layer 70(1) facingthe electrode 64(1) when the sections rotate through the electrodes64(1)–64(2). The sections 69(2) and 69(4) are substantially the same andhave the second insulating layer 70(2) facing the electrode 64(2) andthe first insulating layer 66 facing the electrode 64(1) when thesections rotate through the electrodes 64(1)–64(2). The layer 66 andlayer 70(1) comprises a pair of dissimilar insulators and the layer 66and layer 70(2) also comprises a pair of dissimilar insulators. Each ofthe layers 66 and 70 is made of a dielectric material, such as siliconoxide, silicon dioxide, silicon nitride, aluminum oxide, tantalum oxide,tantalum pentoxide, titanium oxide, titanium dioxide, barium strontiumtitanium oxide, calcium fluoride, and magnesium fluoride, although othertypes of materials which can hold a charge and other numbers of layersfor member 26(3) can be used.

The member 26(3) can store a fixed static electrical charge at theinterfaces 68(1) and 68(2), although member 26(3) can store other typesof charge, such as a floating electrical charge. More specifically, themember 26(3) can hold a fixed charge on the order of at least 1×10¹⁰charges/cm². The member 26(3) forms a structure with a monopole charge,such as electrons, stored at the interface 68(1) between layers 66 and70(1) and at the interface 68(2) between layers 66 and 70(2), althoughother arrangements could be used.

Electrodes 64(1)–64(2) are positioned on opposing sides of member 26(3),are substantially in alignment, and spaced substantially the samedistance from the member 26(3), although other numbers of pairs ofelectrodes could be used and the electrodes could be arranged in otherconfigurations. By way of example only, the distance between each of thepair of electrodes 64(1)–64(2) from the member 26(3) is about 1.0 mm,although this distance can vary. Depending on which of the sections69(1)–69(4) is between the electrodes 64(1)–64(2), the electrodes64(1)–64(2) will be spaced different distances from the interfaces 68(1)and 68(2) in the member 26(3) where the stored, fixed, static, monopolecharge resides.

A load 38 is coupled to the pair of electrodes 64(1) and 64(2), althoughother types of devices can be coupled to the electrodes 64(1) and 64(2),such as a device which uses and/or stores the generated power.

A method for making a power system 20(1) in accordance with oneembodiment of the present invention is described below with reference toFIGS. 1–11. To make a power system 20(1) a suitable substrate 42, suchas silicon oxide on silicon, is provided as shown in FIG. 1, althoughother types of materials could be used. A first trench 44 is formed inthe substrate 42 and the first trench 44 is filled with a firstconductive layer 46, such as aluminum, although other types of materialscould be used. The first conductive layer 46 may be planarized so thatonly the first trench 44 is filled with the first conductive layer 46.By way of example, this may be done by standard chemical mechanicalplanarization (CMP) processing, although other techniques can be used.The resulting first conductive layer 46 in the first trench 44 forms thefirst electrode 28(1).

Referring to FIG. 2, a first insulating layer 48, such as silicondioxide, is deposited on the first conductive layer 46 and a portion ofthe substrate 42, although other types of materials could be used. Asecond trench 50 is formed in the first insulating layer 48 which is atleast in partial alignment with the first electrode 28(1). The secondtrench 50 is etched to the surface of the first electrode 28(1),although other configurations can be used, such as leaving a portion ofthe first insulating layer 48 over the first electrode 28(1).

Referring to FIG. 3, the second trench 50 is filled with a firstsacrificial layer 52, such as polysilicon, although other types ofmaterials can be used, and the first sacrificial layer 52 may beplanarized. By way of example, the planarizing of the first sacrificiallayer 52 may be done by standard CMP processing, although othertechniques can be used.

Referring to FIG. 4, a member 26(1) which can store a fixed electroniccharge is deposited on a portion of the first insulating layer 48 andthe first sacrificial material 52. The member 26(1) has two layers 32and 36 of insulating material, such as silicon oxide and siliconnitride, and silicon oxide and aluminum oxide, and an interface 34between the layers 32 and 36, although other combination of materialsthat can store fixed charge can be deposited as the member 26(1) andother numbers of layers can be used. Additionally, the member 26(1) maycomprise other numbers of layers of material, such as a member 26(2)with a single layer 37 shown in FIG. 12 or multiple layers. For example,a tri-layer of silicon oxide—silicon nitride—silicon oxide may be used.The member 26(1) can move towards and away from the first electrode28(1) and the second electrode 30, although other arrangements can beused, such as shown in FIG. 12 where the member 26(2) is fixed withrespect to one of the electrodes 30 and one of the electrodes 28(2) canmove with respect to member 26(2) and the other electrode 30.

Referring to FIG. 5, electronic charge is injected into the member26(1). A variety of techniques for injecting charge can be used, such asa low to medium energy ballistic electron source or by utilizing asacrificial conductive layer (not shown) disposed on top of the member26(1) and subsequently applying an electric field sufficient to injectelectrons into the member 26(1).

Referring to FIG. 6, a second insulating layer 54, such as silicondioxide, is deposited on the member 26(1), although other types ofmaterials can be used. Next, a third trench 56 is etched in the secondinsulating layer 54 to the member 26(1), although the third trench 56can be etched to other depths. The third trench 56 is in substantialalignment with the second trench 50, although other arrangements can beused as long as the third trench 56 is at least in partial alignmentwith the second trench 50.

Referring to FIG. 7, the third trench 56 is filled with a secondsacrificial material 58, such as polysilicon, although other types ofmaterial can be used. The second sacrificial material 58 may beplanarized.

Referring to FIG. 8, a second conductive layer 60, such as aluminum, isdeposited on at least a portion of the second insulating layer 54 andthe second sacrificial material 58, although other types of materialscan be used. The second conductive layer 60 forms the second electrode30 in this embodiment.

Referring to FIG. 9, a third insulating layer 62, such as silicondioxide, is deposited over at least a portion of the second insulatinglayer 54 and the second electrode 30 to encapsulate the second electrode30, although other types of materials can be used.

Next, holes or vias (not shown) are etched to the first and secondelectrodes 28(1) and 30 to provide contact points and are also etched toprovide access to the first and second sacrificial layers 52 and 58. Thefirst and second sacrificial materials 52 and 58 are removed through thehole(s). A variety of techniques can be used to remove the sacrificialmaterials 52 and 58. For example, if the sacrificial material ispolysilicon, the etchant may be xenon difluoride. Removing the firstsacrificial material 52 forms a first compartment and removing thesecond sacrificial material 58 forms a second compartment in chamber 24.The chamber 24 with first and compartment may be filled with a varietyof different types of fluids and/or materials, such as air or may be ina vacuum.

Referring to FIGS. 10 and 11, the resulting power system 20(1) is shown.A load 38 is coupled to the first and second electrodes 28(1) and 30,although other types of devices could be coupled to the electrodes 28(1)and 30.

The method for making the power system 20(2) shown in FIG. 12 is thesame as the method described for making the power system 20(2) asdescribed with reference to FIGS. 1–11, except as described below. Inthis particular embodiment, in FIG. 3 the second trench 50 is filledwith a first resilient layer 60, such as a foam, although other numbersof layers and other materials and/or fluids could be used and the secondtrench may also be filled with other types of devices, such as one ormore mechanical springs. The first resistant layer 60 is etched to formresilient devices 62(1)–62(4), although the resilient devices can beformed in other manners, such as by inserting mechanical springs in thesecond trench 50. The trenches or openings between the resilient devices62(1)–62(4) is filled with the first sacrificial material 52 and may beplanarized, although other types of materials could be used. By way ofexample, the planarizing of the first sacrificial layer 52 may be doneby standard CMP processing, although other techniques can be used.

Additionally in the embodiment shown in FIG. 12, a member 26(2) whichcan store a fixed electronic charge is deposited on a portion of thefirst insulating layer 48 and the first sacrificial material 52. In thisparticular embodiment, the member 26(2) comprises a single layer 37 thatcan store fixed charge, although member 26(2) may comprise other numbersof layers of material. In this particular embodiment, the member 26(2)is fixed with respect to one of the electrodes 30.

Further, in this particular embodiment, the substrate 42 is removed fromthe first electrode 28(2). The first electrode 28(2) can move to member26(2) and the other electrode 30.

The method for making the power system 20(3) shown in FIG. 13 is thesame as the method described for making the power system 20(1) asdescribed with reference to FIGS. 1–11, except as described below. Inthis particular embodiment, supports 39(1) and 39(2) are placed betweenmember 26(1) and substrate 42, resilient devices 40(5)–40(7) are placedbetween electrode 28(1) and substrate 30, and resilient devices 40(8)and 40(9) are placed between electrode 30 and member 26(1), althoughother configurations, materials, and devices can be used.

The method for making the power system 20(4) shown in FIG. 14 is thesame as the method described for making the power system 20(1) asdescribed with reference to FIGS. 1–11, except as described below. Inthis particular embodiment, an insulating material 51 is placed betweenelectrode 30 and member 26(1) in chamber 24 and resilient devices 40(10)and 40(11) are placed between and connect electrode 30 and substrate 42,although other configurations, materials, and devices can be used.

The method for making the power system 20(5) shown in FIG. 15 is thesame as the method described for making the power system 20(1) asdescribed with reference to FIGS. 1–11, except as described below. Inthis particular embodiment, an insulating material 51 is placed betweenand connects electrode 30 and member 26(1) and electrode 28(1) ispivotally connected at one end to the housing 22, although otherconfigurations, materials, and devices can be used.

A method for making a power system 20(6) in accordance with anotherembodiment of the present invention is described below with reference toFIGS. 16–19(D). To make a power system 20(6) the propeller 60 is seatedon one portion of the rotatable shaft 62 and the member 26(3) is seatedon another portion of the shaft 62 so that when the propeller 60rotates, the shaft 62 is rotated which rotates the member 26(3),although power system 20(6) can be made in other manners with othercomponents, such as with other types of devices for transferring motionto the member 26(3) and/or the electrodes 64(1) and 64(2) and with orwithout the shaft 62.

The electrodes 64(1)–64(2) are positioned on opposing sides of member26(3) so that the electrodes 64(1)–64(2) are substantially in alignmentand are spaced substantially the same distance from the member 26(3),although other configurations can be used. By way of example only, thedistance between each of the pair of electrodes 64(1)–64(2) and themember 26(3) is about 1.0 mm, although this distance can vary.

The load 38 is coupled to the pair of electrodes 64(1) and 64(2),although other types of devices can be coupled to the electrodes 64(1)and 64(2), such as a device which uses and/or stores the generatedpower.

The method for making the member 26(3) is illustrated with reference toFIGS. 19(A)–19(D). Referring to FIG. 19A, second insulating layers 70(1)and 70(2), such as Si₃Ni₄, are deposited on a first insulating layer orsubstrate 66, such as SiO₂. A variety of different types of techniquesfor depositing the second insulating layers 70(1) and 70(2) on to thefirst insulating layer 66 can be used, such as chemical vapor depositionor sputtering, although other techniques could be used.

Referring to FIG. 19B, a portion of the second insulating layer 70(1) isremoved from first insulating layer 66 by masking and etching theportion of second insulating layer 70(1) away, although other techniquesfor removing the portion of second insulting layer 70(1) or otherwiseforming the remaining portion of second insulating layer 70(1) could beused. Another portion of second insulating layer 70(2) which is spacedfrom the remaining portion of the first insulating layer 70(1) on theopposing surface of first insulating layer 66 is removed by masking andetching from first insulating layer 66, although other techniques forremoving the portion of second insulting layer 70(2) or otherwiseforming the remaining portion of second insulating layer 70(2) couldalso be used.

Referring to FIG. 19C, temporary electrodes 100(1) and 100(2) are placedon opposing sides of member 26(3) on second insulating layer 70(1) andfirst insulating layer 66, respectively, and in substantial alignmentwith the interface 68(1) where the charge will be stored. A high voltageis applied across the electrodes 100(1) and 100(2) which causeselectrons to tunnel into the conduction band of the first insulatinglayer 66 and will eventually be trapped at the interface 68(1). Althougha high field injection is shown for trapping charge at the interface68(1), other techniques for storing charge at the interface 68(1) can beused, such as ballistic injection. Although not shown, charge is alsostored in interface 68(2) in the same manner using temporary electrodes100(1) and 100(2) on first and second insulating layers 66 and 70(2),respectively, although other techniques for storing charge at theinterface 68(2) could be used. Once the charge is trapped at theinterfaces 68(1) and 68(2), the temporary electrodes 100(1) and 100(2)are removed and the resulting member 26(3) is illustrated in FIG. 19(D).The member 26(3) forms a structure with a monopole charge with thecharges, in this example electrons, trapped at the interfaces 68(1) and68(2).

The operation of the power system 20(1) in accordance with oneembodiment will be described with reference to FIGS. 10 and 11. In thisparticular embodiment, the member 26(1) has a natural resonantfrequency. Any vibrational or shock input, such as from the localenvironment, will cause the member 26(1) to oscillate. When the member26(1) is nearest to the first electrode 28(1), the portion of inducedopposite sign charge on the first electrode 28(1) will be greater thanon the second electrode 30. When the member 26(1) is nearest the secondelectrode 30, the induced opposite sign charge on the second electrode30 will be greater than on the first electrode 28(1). When the first andsecond electrodes 28(1) and 30 are connected to a load 38, useful energycan be extracted as the charge-storing member oscillates. By way ofexample only, if the power system 20(1) was in a shoe, then as thewearer of the shoe walked or moved the vibrations would be converted touseful energy that could be output to power a load 38.

The output from the first and second electrodes 28(1) and 30 may be postprocessed if desired. For example, if the time varying potential is tobe used to charge a capacitor, a rectifying system together with a diodemay be chosen that will break down above the output potential differencelevel, thus allowing charging of the capacitor, but not discharging backthrough the system. In another application, a voltage regulator may beused to process the time varying potential difference. In still anotherapplication, a full wave rectifier may be used to convert the timevarying potential difference to direct current. Also, other components,such as capacitors, may be used to smooth DC voltage ripples in thegenerated power.

The operation of the power system 20(2) is the same as that for thepower system 20(1), except as described herein. The member 26(2) isfixed with respect to the electrode 30 and the electrode 28(2) can bemoved toward and away from member 26(2), although other configurationsare possible. Any vibrational input, such as from the local environment,will cause the member electrode 28(2) to oscillate or move. Theresilient devices are used to control the oscillation of the electrode28(2) and when the vibrational input stops, eventually returns theelectrode 28(2) to its initial state. When the member 26(2) is nearestto the first electrode 28(2), the portion of induced opposite signcharge on the first electrode 28(2) will be greater than on the secondelectrode 30. When the member 26(2) is nearest the second electrode 30,the induced opposite sign charge on the second electrode 30 will begreater than on the first electrode 28(2). When the first and secondelectrodes 28(2) and 30 are connected to a load 38, useful energy can beextracted as the electrode 28(2) moves with respect to member 26(2).

The operation of the power system 20(3) shown in FIG. 13 is the same asthat for the power system 20(1), except as described herein. With theresilient devices 40(5)–40(9), the member 26(1) and the substrate 42 aremovable with respect to the electrodes 28(1) and 30, although other waysof moving member 26(1) and electrodes 28(1) and 30 with respect to eachother can be used. Any vibrational input will cause member 26(1) andsubstrate 42 to oscillate or move which generates a potential differenceon electrodes 28(1) and 30 that can be extracted as useful energy asdescribed in greater detail above with reference to power systems 20(1)and 20(2).

The operation of the power system 20(4) shown in FIG. 14 is the same asthat for the power system 20(1), except as described herein. With theresilient devices 40(10)–40(11), the electrode 28(1) is movable withrespect to the member 26(1) and substrate 42, although other ways ofmoving member 26(1) and electrodes 28(1) and 30 with respect to eachother can be used. Any vibrational input will cause electrode 28(1) tooscillate or move which generates a potential difference on electrodes28(1) and 30 that can be extracted as useful energy as described ingreater detail above with reference to power systems 20(1) and 20(2).

The operation of the power system 20(5) shown in FIG. 15 is the same asthat for the power system 20(1), except as described herein. Anyvibrational input will cause electrode 28(1) to oscillate or move whichgenerates a potential difference on electrodes 28(1) and 30 which can beextracted as useful energy as described in greater detail above withreference to power systems 20(1) and 20(2).

The operation of the power system 20(6) in accordance with anotherembodiment will be described with reference to FIGS. 16–18(B). When afluid, such as air or water, strikes the propeller 60, the propeller 60rotates which rotates the shaft 62 in a clockwise direction, althoughthe propeller 60 and shaft 62 can be rotated in the opposing direction.Rotating the shaft 62 rotates the member 26(3) in a clockwise directionso that the sections 69(1)–69(4) are sequentially rotated between theelectrodes 64(1)–64(2), although the member 26(3) can be rotated in theopposing direction and through other numbers of pairs of electrodes andthe member 26(3) can be rotated or moved in other manners, such as bymanual motion with a hand crank, and without the shaft.

As the sections 69(1)–69(4) pass between the electrodes 64(1)–64(2) orvice versa, the interfaces 68(1) or 68(2) in sections 69(1)–69(4) wherethe stored fixed static charge resides are closer to either electrode64(1) or to electrode 64(2) which induces a change in potential betweenthe pair of electrodes 64(1)–64(2). More specifically, when sections69(1) and 69(3) are between the electrodes 64(1)–64(2), then theinterface 68(1) in the sections 69(1) and 69(3) where the stored fixedstatic charge resides is closer to the electrode 64(1). When sections69(2) and 69(4) are between the electrodes 64(1)–64(2), then theinterface 68(2) in the sections 69(2) and 69(4) where the stored fixedstatic charge resides is closer to the electrode 64(2). Although foursections 69(1)–69(4) are shown, the power system 20(6) can have more orfewer sections. The induced potential between electrodes 64(1)–64(2) canbe output to a device, such as a load 38 or a power storage device.

Accordingly, the present invention is directed to a renewing powersource or supply, energy harvester, or energy generator. The presentinvention uses embedded static charge in a member in a resonating orotherwise moving structure to provide a power source for devices. Energyis effectively extracted from the local environment from a displacementcurrent caused by the embedded charge member's and/or one or more of theelectrodes movement due to movement of the embedded charge member, suchas natural vibrations or shocks from the local surroundings, manualmovement, e.g. with a hand crank, or wind, water, or other fluidmovement.

Having thus described the basic concept of the invention, it will berather apparent to those skilled in the art that the foregoing detaileddisclosure is intended to be presented by way of example only, and isnot limiting. Various alterations, improvements, and modifications willoccur and are intended to those skilled in the art, though not expresslystated herein. These alterations, improvements, and modifications areintended to be suggested hereby, and are within the spirit and scope ofthe invention. Additionally, the recited order of processing elements orsequences, or the use of numbers, letters, or other designationstherefor, is not intended to limit the claimed processes to any orderexcept as may be specified in the claims. Accordingly, the invention islimited only by the following claims and equivalents thereto.

1. A power system comprising: a non-conducting member with a storedstatic charge which is a monopole charge to form a monopole structure,the non-conducting member comprises two or more sections; and at leasttwo or more electrodes, wherein each of the two or more electrodes isspaced from and on substantially opposing sides of the member from theother electrode and is at least partially in alignment with the otherelectrode; wherein at least one of the member and the at least two ormore electrodes is moveable with respect to the other; and wherein whenat least one of the sections is at least partially between the two ormore electrodes, the at least one of the sections has the stored staticelectric charge closer to one of the two or more electrodes and when atleast one of the other sections is at least partially between the two ormore electrodes, the at least one of the other sections has the storedstatic electric charge closer to the other one of the two or moreelectrodes.
 2. The system as set forth in claim 1 further comprising anenergy conversion device coupled to the member, where movement of theenergy conversion device rotates the member.
 3. The system as set forthin claim 2 further comprising a shaft connected between the energyconversion device and the member, wherein movement of the energyconversion device rotates the shaft and the member.
 4. The system as setforth in claim 2 wherein the energy conversion device comprises apropeller.
 5. The system as set forth in claim 1 wherein each of thesections has two or more layers of dissimilar insulators, wherein thestored static electrical charge is substantially at an interface betweenthe layers.
 6. The system as set forth in claim 5 wherein each of thelayers of the member is made from one or more materials selected from agroup consisting of silicon oxide, silicon dioxide, silicon nitride,aluminum oxide, tantalum oxide, tantalum pentoxide, titanium oxide,titanium dioxide, barium strontium titanium oxide, calcium fluoride, andmagnesium fluoride.
 7. The system as set forth in claim 1 wherein themonopole charge comprises electrons.
 8. The system as set forth in claim1 wherein the member comprises four sections.
 9. The system as set forthin claim 1 further comprising a load coupled to the two or moreelectrodes.
 10. A method of making a power system, the methodcomprising: providing a non-conducting member with a stored staticcharge which is a monopole charge to form a monopole structure, thenon-conducting member comprises two or more sections; and providing atleast one two or more electrodes, wherein each of the two or moreelectrodes is spaced from and on substantially opposing sides of themember from the other electrode and is at least partially in alignmentwith the other electrode; wherein at least one of the member and the atleast two or more electrodes is moveable with respect to the other; andwherein when at least one of the sections is at least partially betweenthe two or more electrodes, the at least one of the sections has thestored static electric charge closer to one of the two or moreelectrodes and when at least one of the other sections is at leastpartially between the two or more electrodes, the at least one of theother sections has the stored static electric charge closer to the otherone of the two or more electrodes.
 11. The method as set forth in claim10 further comprising coupling a energy conversion device to the member,wherein movement of the energy conversion device rotates the member. 12.The method as set forth in claim 11 further comprising connecting themember and the energy conversion device to a portion of a rotatableshaft, wherein movement of the energy conversion device rotates theshaft and the member.
 13. The method as set forth in claim 11 whereinthe energy conversion device comprises a propeller.
 14. The method asset forth in claim 10 wherein each of the sections has two or morelayers of dissimilar insulators, wherein the stored static electricalcharge is substantially at an interface between the layers.
 15. Themethod as set forth in claim 14 wherein each of the layers of the memberis made from one or more materials selected from a group consisting ofsilicon oxide, silicon dioxide, silicon nitride, aluminum oxide,tantalum oxide, tantalum pentoxide, titanium oxide, titanium dioxide,barium strontium titanium oxide, calcium fluoride, and magnesiumfluoride.
 16. The method as set forth in claim 10 wherein the monopolecharge comprises electrons.
 17. The method as set forth in claim 10wherein the member comprises four sections.
 18. The method as set forthin claim 10 further comprising coupling a load to the two or moreelectrodes.
 19. A method for generating power, the method comprising:moving at least one of a non-conducting member and at least two or moreelectrodes with respect to the other, wherein the member has a storedstatic electrical charge which is a monopole charge to form a monopolestructure and comprises two or more sections, wherein when at least oneof the sections is at least partially between the two or moreelectrodes, the at least one of the sections has the stored staticelectric charge closer to one of the two or more electrodes and when atleast one of the other sections is at least partially between the two ormore electrodes, the at least one of the other sections has the storedstatic electric charge closer to the other one of the two or moreelectrodes; inducing a potential on the pair electrodes as a result ofthe moving; and outputting the induced potential.
 20. The method as setforth in claim 19 further comprising storing the outputted inducedpotential.
 21. The method as set forth in claim 19 wherein each of thesections with the stored static charge is a structure with a monopolecharge.
 22. The method as set forth in claim 21 wherein the monopolecharge comprises electrons.